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[IEEE 2010 International Semiconductor Conference (CAS 2010) - Sinaia (2010.10.11-2010.10.13)] CAS 2010 Proceedings (International Semiconductor Conference) - Low stress PECVD amorphous silicon carbide for MEMS applications

✍ Scribed by Avram, Marioara; Avram, Andrei; Bragaru, Adina; Bangtao Chen, ; Poenar, Daniel Puiu; Iliescu, Ciprian

No coin nor oath required. For personal study only.

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