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[IEEE 2010 International Kharkov Symposium on Physics and Engineering of Microwaves, Millimeter and Submillimeter Waves (MSMW) - Kharkiv, Ukraine (2010.06.21-2010.06.26)] 2010 INTERNATIONAL KHARKOV SYMPOSIUM ON PHYSICS AND ENGINEERING OF MICROWAVES, MILLIMETER AND SUBMILLIMETER WAVES - Millimeter wave technique for non-destructive Si wafer homogeneity characterization

✍ Scribed by Laurinavicius, A.; Derkach, V.N.; Anbinderis, T.

Book ID: 120257549
Publisher: IEEE
Year: 2010
Weight: 671 KB
Category: Article
ISBN: 1424479002
DOI: 10.1109/MSMW.2010.5546091

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