[IEEE 2010 International Conference on Measuring Technology and Mechatronics Automation (ICMTMA 2010) - Changsha City, China (2010.03.13-2010.03.14)] 2010 International Conference on Measuring Technology and Mechatronics Automation - Micro Inductively Coupled Plasma Excitation Source Based on the Three-Dimensional Spiral-Shaped Coil

✍ Scribed by Wang, Yongqing; Wang, Zhanyou; Dong, Limei; Zhou, Yingchang; Sun, Rongxia; Li, Chunli

• Book ID: 111958820
• Publisher: IEEE
• Year: 2010
• Weight: 302 KB
• Volume: 0
• Category: Article
• ISBN: 1424450012
• DOI: 10.1109/icmtma.2010.153