✦ LIBER ✦

[IEEE 2010 IEEE Ultrasonics Symposium (IUS) - San Diego, CA, USA (2010.10.11-2010.10.14)] 2010 IEEE International Ultrasonics Symposium - Optimization of thin AlN sputtered films for X-band BAW resonators

✍ Scribed by Iborra, E.; Clement, M.; Capilla, J.; Olivares, J.; Felmetsger, V.

No coin nor oath required. For personal study only.

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