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[IEEE 2010 IEEE 37th International Conference on Plasma Sciences (ICOPS) - Norfolk, VA, USA (2010.06.20-2010.06.24)] 2010 Abstracts IEEE International Conference on Plasma Science - Effect of RF voltage non-uniformity on capacitive discharge

✍ Scribed by Ohshita, T.; Matsukuma, M.; Kang, S.-Y.; Sawada, I.

Book ID: 118233513
Publisher: IEEE
Year: 2010
Weight: 126 KB
Volume: 0
Category: Article
ISBN: 1424454743
DOI: 10.1109/plasma.2010.5534155

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