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[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Efficient internal electrostatic transduction of the 41st radial mode of a ring resonator

โœ Scribed by Ziaei-Moayyed, M.; Quevy, E. P.; Hsieh, J.; Howe, R. T.


Book ID
121709323
Publisher
IEEE
Year
2010
Weight
686 KB
Category
Article
ISBN
1424457610

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