𝔖 Bobbio Scriptorium

✦ LIBER ✦

[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Light sensitive SiGe MEM resonator for detection and frequency tuning applications.

✍ Scribed by Stoffels, S.; Severi, S.; Vanhoof, R.; Mertens, R.; Puers, R.; Witvrouw, A.; Tilmans, H.A.C.

Book ID: 121333341
Publisher: IEEE
Year: 2010
Weight: 358 KB
Category: Article
ISBN: 1424457610
DOI: 10.1109/MEMSYS.2010.5442314

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

[IEEE 2010 IEEE 23rd International Confe

[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Navigation grade MEMS accelerometer

✍ Zwahlen, Pascal; Nguyen, Anne-Marie; Dong, Yufeng; Rudolf, Felix; Pastre, Marc; 📂 Article 📅 2010 🏛 IEEE ⚖ 369 KB

[IEEE 2010 IEEE 23rd International Confe

[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Parylene stiction

✍ Yu, Feiqiao; Lin, Jeffrey Chun-Hui; Chen, Po-Jui; Tai, Yu-Chong 📂 Article 📅 2010 🏛 IEEE ⚖ 603 KB

[IEEE 2010 IEEE 23rd International Confe

[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - MEMS energy harvester for wireless biosensors

✍ He, Cairan; Kiziroglou, Michail E.; Yates, David C.; Yeatman, Eric M. 📂 Article 📅 2010 🏛 IEEE ⚖ 653 KB

[IEEE 2010 IEEE 23rd International Confe

[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Piezoelectric PDMS electrets for MEMS transducers

✍ Hsu, Tsung-Hsing; Yeh, Che-Nan; Su, Yu-Chuan 📂 Article 📅 2010 🏛 IEEE ⚖ 540 KB

[IEEE 2010 IEEE 23rd International Confe

[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - A new capacitive type MEMS microphone

✍ Leinenbach, Christina; van Teeffelen, Kathrin; Laermer, Franz; Seidel, Helmut 📂 Article 📅 2010 🏛 IEEE ⚖ 540 KB

[IEEE 2010 IEEE 23rd International Confe

[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - A high sensitivity uniaxial resonant accelerometer

✍ Comi, Claudia; Corigliano, Alberto; Langfelder, Giacomo; Longoni, Antonio; Tocch 📂 Article 📅 2010 🏛 IEEE ⚖ 508 KB