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[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Design and implementation of a novel double-poly microphone with rigid acoustic receiver, flexible spring supporter, and harm backplate

✍ Scribed by Chan, Chun-Kai; Lai, Wei-Cheng; Wu, Mingching; Fang, Weileun

Book ID: 121332654
Publisher: IEEE
Year: 2010
Weight: 825 KB
Category: Article
ISBN: 1424457610
DOI: 10.1109/MEMSYS.2010.5442324

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