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[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - A fully packaged piezoelectric switch with lowvoltage actuation and electrostatic hold

✍ Scribed by Cueff, Matthieu; Defay, Emmanuel; Rey, Patrice; Le Rhun, Gwenael; Perruchot, Francois; Ferrandon, Christine; Mercier, Denis; Domingue, Frederic; Suhm, Aurelien; Aid, Marc; Liu, Lianjiu; Pacheco, Sergio; Miller, Mel

Book ID: 121319693
Publisher: IEEE
Year: 2010
Weight: 793 KB
Category: Article
ISBN: 1424457610
DOI: 10.1109/MEMSYS.2010.5442529

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