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[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - A novel fatigue test with ramping stress amplitude to evaluate fatigue behavior of polysilicon thin films

✍ Scribed by Huy, Vu Le; Gaspar, Joao; Paul, Oliver; Kamiya, Shoji

Book ID: 121319692
Publisher: IEEE
Year: 2010
Weight: 944 KB
Category: Article
ISBN: 1424457610
DOI: 10.1109/MEMSYS.2010.5442527

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