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[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Highly linear, ultra sensitive bio-MEMS force sensors with large force measurement range

✍ Scribed by Rajagopalan, Jagannathan; Tofangchi, Alireza; Saif, M. Taher A.

Book ID: 121316989
Publisher: IEEE
Year: 2010
Weight: 793 KB
Category: Article
ISBN: 1424457610
DOI: 10.1109/MEMSYS.2010.5442558

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