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[IEEE 2010 5th IEEE Conference on Industrial Electronics and Applications (ICIEA) - Taichung, Taiwan (2010.06.15-2010.06.17)] 2010 5th IEEE Conference on Industrial Electronics and Applications - Deep UV sensors using surface acoustic wave oscillators fabricated on single crystalline AlN films grown on sapphire substrates

✍ Scribed by Laksana, Chipta P.; Meei-Ru Chen, ; Kao, Hui-Ling; Jeng, Erik S.; Sheng-Rui Jian,

Book ID: 111858967
Publisher: IEEE
Year: 2010
Weight: 617 KB
Volume: 0
Category: Article
ISBN: 1424450454
DOI: 10.1109/iciea.2010.5514720

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