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[IEEE 2010 2nd International Conference on Mechanical and Electrical Technology (ICMET) - Singapore, Singapore (2010.09.10-2010.09.12)] 2010 International Conference on Mechanical and Electrical Technology - Design of MEMS based capacitive accelerometer

✍ Scribed by Sethuramalingam, T.K.; Vimalajuliet, A.

Book ID: 126647103
Publisher: IEEE
Year: 2010
Weight: 898 KB
Category: Article
ISBN: 1424481007
DOI: 10.1109/ICMET.2010.5598424

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