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[IEEE 2009 International Students and Young Scientists Workshop "Photonics and Microsystems" - Wernigerode, Germany (2009.06.25-2009.06.27)] 2009 International Students and Young Scientists Workshop "Photonics and Microsystems" - In situ measurements of the atomic layer deposition of high-k dielectrics by atomic force microscope for advanced microsystems

✍ Scribed by Kolanek, Krzysztof; Tallarida, Massimo; Karavaev, Konstantin; Schmeisser, Dieter

Book ID: 126618893
Publisher: IEEE
Year: 2009
Weight: 965 KB
Category: Article
ISBN: 1424443040
DOI: 10.1109/STYSW.2009.5470304

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