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[IEEE 2009 International Semiconductor Device Research Symposium (ISDRS 2009) - College Park, MD (2009.12.9-2009.12.11)] 2009 International Semiconductor Device Research Symposium - Optimization and characterization of RF MEMS inductors fabricated in PolyMUMPS technology

✍ Scribed by Moreno-Villarreal, M.G.; Mireles Jr.-Garcia, J.; Ambrosio-Lazaro, R.C.

Book ID: 115538797
Publisher: IEEE
Year: 2009
Weight: 120 KB
Volume: 0
Category: Article
ISBN: 1424460301
DOI: 10.1109/isdrs.2009.5378341

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