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[IEEE 2009 International Conference on Industrial Mechatronics and Automation (ICIMA 2009) - Chengdu, China (2009.05.15-2009.05.16)] 2009 International Conference on Industrial Mechatronics and Automation - Design optimization of cantilever Beam MEMS switch

✍ Scribed by Yanjue Gong, ; Li Zhang, ; Fu Zhao, ; Chunling Meng, ; Liang Lv,

Book ID: 120972145
Publisher: IEEE
Year: 2009
Tongue: English
Weight: 585 KB
Category: Article
ISBN: 1424438179
DOI: 10.1109/ICIMA.2009.5156552

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