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[IEEE 2009 IEEE 36th International Conference on Plasma Science (ICOPS) - San Diego, CA, USA (2009.06.1-2009.06.5)] 2009 IEEE International Conference on Plasma Science - Abstracts - The spatial and temporal variation of the electron energy distribution function (EEDF) in the HiPIMS discharge

✍ Scribed by Sigurjonsson, P.; Gudmundsson, J. T.; Larsson, P.; Lundin, D.; Helmersson, U.

Book ID: 121751582
Publisher: IEEE
Year: 2009
Weight: 80 KB
Category: Article
ISBN: 1424426170
DOI: 10.1109/PLASMA.2009.5227253

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