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[IEEE 2008 IEEE International Symposium on Precision Clock Synchronization for Measurement, Control and Communication - Ann Arbor, MI (2008.9.22-2008.9.26)] 2008 IEEE International Symposium on Precision Clock Synchronization for Measurement, Control and Communication - Semiconductor manufacturing equipment data acquisition simulation for timing performance analysis

✍ Scribed by Ya-Shian Li-Baboud, ; Xiao Zhu, ; Anand, D.; Hussaini, S.; Moyne, J.

Book ID: 126746633
Publisher: IEEE
Year: 2008
Weight: 759 KB
Category: Article
ISBN: 1424422752
DOI: 10.1109/ISPCS.2008.4659217

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