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[IEEE 2008 IEEE 35th International Conference on Plasma Science (ICOPS) - Karlsruhe, Germany (2008.06.15-2008.06.19)] 2008 IEEE 35th International Conference on Plasma Science - Deposition of diamond-like carbon films using hollow cathode plasma source

✍ Scribed by Jiang, H. F.; Tian, X. B.; Yang, S. Q.; Fu, R. K. Y.; Chu, Paul K.

Book ID: 125902982
Publisher: IEEE
Year: 2008
Tongue: English
Weight: 31 KB
Category: Article
ISBN: 1424419298
DOI: 10.1109/PLASMA.2008.4590718

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