𝔖 Bobbio Scriptorium

✦ LIBER ✦

[IEEE 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems - Tucson, AZ, USA (2008.01.13-2008.01.17)] 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems - Tri-axial high-g CMOS-MEMS capacitive accelerometer array

✍ Scribed by Wung, A.; Park, R.V.; Rebello, K.J.; Fedder, G.K.

Book ID: 126654567
Publisher: IEEE
Year: 2008
Weight: 811 KB
Category: Article
ISBN: 1424417937
DOI: 10.1109/MEMSYS.2008.4443796

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