𝔖 Bobbio Scriptorium

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[IEEE 2008 Conference on Optoelectronic and Microelectronic Materials and Devices (COMMAD) - Sydney, Australia (2008.07.28-2008.08.1)] 2008 Conference on Optoelectronic and Microelectronic Materials and Devices - Isotropic dry-etching of SiC for AlGaN/GaN MEMS fabrication

✍ Scribed by Niebelschutz, F.; Pezoldt, J.; Stauden, T.; Cimalla, V.; Tonisch, K.; Bruckner, K.; Hein, M.; Ambacher, O.; Schober, A.

Book ID: 124063084
Publisher: IEEE
Year: 2008
Tongue: English
Weight: 199 KB
Category: Article
ISBN: 1424427169
DOI: 10.1109/COMMAD.2008.4802084

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