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[IEEE 2008 9th International Conference on Solid-State and Integrated-Circuit Technology (ICSICT) - Beijing, China (2008.10.20-2008.10.23)] 2008 9th International Conference on Solid-State and Integrated-Circuit Technology - Impurity effect on internal gettering in Czochralski silicon

✍ Scribed by Jiahe Chen, ; Deren Yang, ; Xiangyang Ma, ; Duanlin Que,

Book ID: 121350869
Publisher: IEEE
Year: 2008
Weight: 697 KB
Category: Article
ISBN: 1424421853
DOI: 10.1109/ICSICT.2008.4734659

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