[IEEE 2008 33rd IEEE Photovolatic Specialists Conference (PVSC) - San Diego, CA, USA (2008.05.11-2008.05.16)] 2008 33rd IEEE Photovolatic Specialists Conference - Effect of process parameters on the properties of diamond like carbon films deposition by microwave surface-wave plasma CVD

✍ Scribed by Ghimire, Dilip Chandra; Adhikari, Sudip; Aryal, Hare Ram; Kalit, Golap; Uchida, Hideo; Umeno, Masayoshi

• Book ID: 121256477
• Publisher: IEEE
• Year: 2008
• Weight: 1018 KB
• Category: Article
• ISBN: 142441640X
• DOI: 10.1109/PVSC.2008.4922561