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[IEEE 2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics - Nara-city, Japan (2007.05.27-2007.05.31)] 2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics - Atomic Vapor Deposition (AVD®) for High-k Dielectric and Ferroelectric films

✍ Scribed by Vezin, V.; Isobe, C.; Boissiere, O.; Baumann, P.K.; Weber, U.; Barbar, G.; Lindner, J.


Book ID
126614400
Publisher
IEEE
Year
2007
Weight
996 KB
Category
Article
ISBN
1424413346

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