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[IEEE 2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics - Nara-city, Japan (2007.05.27-2007.05.31)] 2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics - Atomic Vapor Deposition (AVD®) for High-k Dielectric and Ferroelectric films

✍ Scribed by Vezin, V.; Isobe, C.; Boissiere, O.; Baumann, P.K.; Weber, U.; Barbar, G.; Lindner, J.

Book ID: 126614400
Publisher: IEEE
Year: 2007
Weight: 996 KB
Category: Article
ISBN: 1424413346
DOI: 10.1109/ISAF.2007.4393159

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