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[IEEE 2007 International Conference on Mechatronics and Automation - Harbin, China (2007.08.5-2007.08.8)] 2007 International Conference on Mechatronics and Automation - Motion Control of an Ultra Precision Positioning Stage

✍ Scribed by Shangying, Zhang; Xuedong, Chen; Hui, Zhao

Book ID: 121298220
Publisher: IEEE
Year: 2007
Weight: 244 KB
Category: Article
ISBN: 1424408288
DOI: 10.1109/ICMA.2007.4304023

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