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[IEEE 2007 International Conference on Industrial and Information Systems - Peradeniya, Sri Lanka (2007.08.9-2007.08.11)] 2007 International Conference on Industrial and Information Systems - Analysis and optimization of MEMS electrostatic microactuator

✍ Scribed by Behjat, V.; Vahedi, A.

Book ID: 118172142
Publisher: IEEE
Year: 2007
Tongue: English
Weight: 782 KB
Volume: 0
Category: Article
ISBN: 1424411513
DOI: 10.1109/iciinfs.2007.4579223

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