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[IEEE 2007 IEEE Ultrasonics Symposium Proceedings - New York, NY, USA (2007.10.28-2007.10.31)] 2007 IEEE Ultrasonics Symposium Proceedings - P1H-4 FBAR Characteristics with AlN Film Using MOCVD Method and Ru/Ta Electrode

✍ Scribed by Aota, Y.; Tanifuji, S.; Oguma, H.; Kameda, S.; Nakase, H.; Takagi, T.; Tsubouchi, K.

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