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[IEEE 2007 IEEE International Behavioral Modeling and Simulation Workshop - San Jose, CA, USA (2007.09.20-2007.09.21)] 2007 IEEE International Behavioral Modeling and Simulation Workshop - An efficient and accurate MEMS accelerometer model with sense finger dynamics for applications in mixed-technology control loops

✍ Scribed by Chenxu Zhao, ; Leran Wang, ; Kazmierski, Tom J.

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