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[IEEE 2007 8th International Conference on Electronic Measurement and Instruments - Xian, China (2007.08.16-2007.07.18)] 2007 8th International Conference on Electronic Measurement and Instruments - Optical interferometry Endpoint Detection for Plasma Etching

✍ Scribed by Wei, Wang; Zhongwen, Lan; Wu, Wen; Yungui, Gong

Book ID: 120216227
Publisher: IEEE
Year: 2007
Weight: 490 KB
Category: Article
ISBN: 142441136X
DOI: 10.1109/ICEMI.2007.4351131

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