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[IEEE 2007 7th IEEE Conference on Nanotechnology (IEEE-NANO) - Hong Kong, China (2007.08.2-2007.08.5)] 2007 7th IEEE Conference on Nanotechnology (IEEE NANO) - A novel design methodology for MEMS device

✍ Scribed by Xin Zhao, ; Lei Wang, ; Yiyong Tan, ; Guangyi Sun, ; Guizhang Lu,

No coin nor oath required. For personal study only.

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