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[IEEE 2006 IEEE Workshop on Microelectronics and Electron Devices, 2006. WMED '06. - Boise, ID, USA (April 14, 2006)] 2006 IEEE Workshop on Microelectronics and Electron Devices, 2006. WMED '06. - Design and fabrication of a MEMS capacitive chemical sensor system

✍ Scribed by Saxena, V.; Plum, T.J.; Jessing, J.R.; Baker, R.J.

Book ID: 120982565
Publisher: IEEE
Year: 2006
Weight: 173 KB
Category: Article
ISBN-13: 9781424403745
DOI: 10.1109/WMED.2006.1678286

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