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[IEEE 2006 8th International Conference on Actual Problems of Electronic Instrument Engineering - Novosibirsk, Russia (2006.09.26-2006.09.28)] 2006 8th International Conference on Actual Problems of Electronic Instrument Engineering - Plasma Chemical Etching of Silicon

✍ Scribed by Bogomolov, B.K.

Book ID: 124168581
Publisher: IEEE
Year: 2006
Tongue: Russian
Weight: 300 KB
Category: Article
ISBN-13: 9785778206625
DOI: 10.1109/APEIE.2006.4292430

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