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[IEEE 2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Zhuhai, China (2006.01.18-2006.01.21)] 2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Design of an Electrostatic Repulsive-Force Based Vertical Micro Actuator

โœ Scribed by Da Y. Qiao, ; Yuan, Wei Z.; Li, Xiao Y.


Book ID
115508788
Publisher
IEEE
Year
2006
Weight
124 KB
Volume
0
Category
Article
ISBN-13
9781424401406

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