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[IEEE 2005 IEEE International Conference on Mechatronics - Taipei, Taiwan (10-12 July 2005)] IEEE International Conference on Mechatronics, 2005. ICM '05. - Development of an optical pickup system for measuring the displacement of the micro cantilever in scanning probe microscope

โœ Scribed by Kuang-Yuh Huang, ; En-Te Hwu, ; Hsin-Yi Chow, ; Shao-Kan Hung,


Book ID
120210418
Publisher
IEEE
Year
2005
Tongue
English
Weight
647 KB
Category
Article
ISBN-13
9780780389984

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