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[IEEE 2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04) - Banff, AB, Canada (25-27 Aug. 2004)] 2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04) - Advanced MEMS and Integrated-Optic Components for Multifunctional Integrated Optical Micromachines

✍ Scribed by Kruzelecky, R.V.; Wong, B.; Zou, J.; Haddad, E.; Jamroz, W.; Yelon, A.; Beaudry, R.; Grenier, O.; Zheng, W.; Phong, L.N.

Book ID: 118236988
Publisher: IEEE
Year: 2004
Tongue: English
Weight: 732 KB
Volume: 0
Category: Article
ISBN-13: 9780769521893
DOI: 10.1109/icmens.2004.1508967

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