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[IEEE 2004 24th International Conference on Microelectronics - Nis, Serbia (16-19 May 2004)] 2004 24th International Conference on Microelectronics (IEEE Cat. No.04TH8716) - Focused ion beam lithography-overview and new approaches

✍ Scribed by Arshak, K.; Mihov, M.; Arshak, A.; McDonagh, D.; Sutton, D.

Book ID: 118026118
Publisher: IEEE
Year: 2004
Tongue: English
Weight: 361 KB
Volume: 2
Category: Article
ISBN-13: 9780780381667
DOI: 10.1109/icmel.2004.1314862

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