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[IEEE 2003 IEEE/LEOS International Conference on Optical MEMS - Waikoloa, HI, USA (18-21 Aug. 2003)] 2003 IEEE/LEOS International Conference on Optical MEMS (Cat. No.03EX682) - Vertical comb drive actuator constructed by buckled bridges in SOI-MEMS

✍ Scribed by Sasaki, M.; Briand, D.; Noell, W.; de Rooij, N.

Book ID: 126724794
Publisher: IEEE
Year: 2003
Tongue: English
Weight: 346 KB
Category: Article
ISBN-13: 9780780378308
DOI: 10.1109/OMEMS.2003.1233481

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