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[IEEE 2003 IEEE Ultrasonics Symposium - Honolulu, HI, USA (5-8 Oct. 2003)] IEEE Symposium on Ultrasonics, 2003 - Material parameters of rf magnetron sputtered SiO/sub 2/ thin films for temperature stable SiO/sub 2//LiNbO/sub 3/ saw devices

โœ Scribed by Tomar, M.; Gupta, V.; Sreenivas, K.


Book ID
121664758
Publisher
IEEE
Year
2003
Tongue
English
Weight
55 KB
Category
Article
ISBN-13
9780780379220

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