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[IEEE 2002 International Conference on Communications, Circuits and Systems and West Sino Exposition Proceedings - Chengdu, China (29 June-1 July 2002)] IEEE 2002 International Conference on Communications, Circuits and Systems and West Sino Expositions - Research of anisotropic etching in KOH water solution with isopropyl alcohol

✍ Scribed by Yufang Lv, ; Jiazhi Ma, ; Jun Zou, ; Xin Wang,

Book ID: 121188235
Publisher: IEEE
Year: 2002
Weight: 294 KB
Volume: 2
Category: Article
ISBN-13: 9780780375475
DOI: 10.1109/ICCCAS.2002.1179123

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