✦ LIBER ✦

[IEEE 2002 IEEE/LEOS International Conference on Optical MEMS - Lugano, Switzerland (20-23 Aug. 2002)] IEEE/LEOS International Conference on Optical MEMs - A 2-axis comb-driven micromirror array for 3D MEMS switches

✍ Scribed by Mizuno, Y.; Tsuboi, O.; Kouma, N.; Soneda, H.; Okuda, H.; Nakamura, Y.; Ueda, S.; Sawaki, I.; Yamagishi, F.

No coin nor oath required. For personal study only.

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