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[IEEE 2002 IEEE International Ultrasonics Symposium - Munich, Germany (8-11 Oct. 2002)] 2002 IEEE Ultrasonics Symposium, 2002. Proceedings. - Growth of sputtered AlN thin film on glass in room temperature

✍ Scribed by Lee, C.K.; Placido, F.; Cochran, S.; Kirk, K.J.

No coin nor oath required. For personal study only.

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