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[IEEE 2002 IEEE International Ultrasonics Symposium - Munich, Germany (8-11 Oct. 2002)] 2002 IEEE Ultrasonics Symposium, 2002. Proceedings. - High frequency SAW devices on AlGaN: fabrication, characterization and integration with optoelectronics

✍ Scribed by Palacios, T.; Calle, F.; Grajal, J.; Monroy, E.; Eickhoff, M.; Ambacher, O.; Omnes, F.

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