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[IEEE 2002 8th International Advanced Packaging Materials Symposium - Stone Mountain, GA, USA (3-6 March 2002)] 2002 Proceedings. 8th International Advanced Packaging Materials Symposium (Cat. No.02TH8617) - Measurement of residual stress in single crystal silicon wafers

✍ Scribed by Vrinceanu, I.D.; Danyluk, S.

Book ID: 120611954
Publisher: IEEE
Year: 2002
Weight: 460 KB
Category: Article
ISBN-13: 9780780374348
DOI: 10.1109/ISAPM.2002.990402

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