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[IEEE 2001 IEEE Ultrasonics Symposium. Proceedings. An International Symposium - Atlanta, GA, USA (7-10 Oct. 2001)] 2001 IEEE Ultrasonics Symposium. Proceedings. An International Symposium (Cat. No.01CH37263) - A high power ultrasonic linear motor with a longitudinal-bending hybrid transducer for high-speed and precise drive of a heavy stage

✍ Scribed by Cheol-Ho Yun, ; Ishii, T.; Nakamura, K.; Ueha, S.; Akashi, K.

Book ID: 120935405
Publisher: IEEE
Year: 2001
Weight: 200 KB
Edition: 2001
Volume: 1
Category: Article
ISBN-13: 9780780371774
DOI: 10.1109/ULTSYM.2001.991679

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