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[IEEE 2001 IEEE International SOI Conference. Proceedings - Durango, CO, USA (1-4 Oct. 2001)] 2001 IEEE International SOI Conference. Proceedings (Cat. No.01CH37207) - Comparison of boron diffusion profiles in ultra thin SOI structures

✍ Scribed by Uchida, H.; Ichimura, M.; Arai, E.

No coin nor oath required. For personal study only.

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