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[IEEE 2001 1st IEEE Conference on Nanotechnology. IEEE-NANO 2001 - Maui, HI, USA (28-30 Oct. 2001)] Proceedings of the 2001 1st IEEE Conference on Nanotechnology. IEEE-NANO 2001 (Cat. No.01EX516) - Formation of nano-structured thin silicon layers by hydrogen plasma treatment of monocrystalline silicon

✍ Scribed by Fahrner, W.R.; Job, R.; Ulyashin, A.

Book ID: 121336624
Publisher: IEEE
Year: 2001
Tongue: English
Weight: 859 KB
Category: Article
ISBN-13: 9780780372153
DOI: 10.1109/NANO.2001.966434

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