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[IEEE 19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey (22-26 Jan. 2006)] 19th IEEE International Conference on Micro Electro Mechanical Systems - Dynamics of Silicon Micro-Heaters: Modelling and Experimental Identification

✍ Scribed by Wiesmann, D.; Sebastian, A.

Book ID: 120927790
Publisher: IEEE
Year: 2006
Weight: 458 KB
Category: Article
ISBN-13: 9780780394759
DOI: 10.1109/MEMSYS.2006.1627766

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