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[IEEE 1998 IEEE International Frequency Control Symposium (Cat. No.98CH36165) - Pasadena, CA, USA (27-29 May 1998)] Proceedings of the 1998 IEEE International Frequency Control Symposium (Cat. No.98CH36165) - A sensor for thin film thickness monitor using torsional quartz crystal resonators of stepped, free-free bar-type

✍ Scribed by Kawashima, H.; Sunaga, K.

Book ID: 126638248
Publisher: IEEE
Year: 1998
Weight: 279 KB
Category: Article
ISBN-13: 9780780343733
DOI: 10.1109/FREQ.1998.717975

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