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[IEEE 1997 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings - San Francisco, CA, USA (6-8 Oct. 1997)] 1997 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat. No.97CH36023) - Sense and sensibility: the scaleable minifab

✍ Scribed by Duley, J.R.; Varma, V.; Wood, S.C.

Book ID: 126998948
Publisher: IEEE
Year: 1997
Tongue: English
Weight: 444 KB
Edition: 1997
Category: Article
ISBN-13: 9780780337527
DOI: 10.1109/issm.1997.664491

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