[IEEE 1997 IEEE 6th International Conference on Emerging Technologies and Factory Automation Proceedings, EFTA '97 - Los Angeles, CA, USA (9-12 Sept. 1997)] 1997 IEEE 6th International Conference on Emerging Technologies and Factory Automation Proceedings, EFTA '97 - [110] silicon etching for high aspect ratio comb structures

✍ Scribed by Seong-Hyok Kim, ; Sang-Hun Lee, ; Hyung-Taek Lim, ; Yong-Kweon Kim, ; Seung-Ki Lee,

• Book ID: 115516422
• Publisher: IEEE
• Year: 1997
• Weight: 803 KB
• Edition: 1997
• Volume: 0
• Category: Article
• ISBN-13: 9780780341920
• DOI: 10.1109/etfa.1997.616277